76mm -300mm Etched Silicon Wafer (3"-12")

Thaum tshav kub thiab oxidizing tshuaj raug siv rau lub silicon wafer, ib txheej ntawm silicon dioxide (SiO2) yog tsim. Cov txheej txheem no hu ua thermal oxidation. Txawm hais tias cov roj halogen tuaj yeem siv tau, hydrogen thiab / lossis oxygen gas feem ntau siv los tsim cov txheej txheem no. Rau feem ntau cov kev xav tau, thermal oxide kev loj hlob siv lub tshav kub kom nrawm cov tshuaj tiv thaiv no thiab tsim cov oxide txheej mus txog 25, 000Å tuab. Silicon dioxide kev loj hlob tshwm sim ntawm wafers nyob rau hauv ambient huab cua mus rau ib ncig ntawm 20Å (angstroms) tuab.
Txawm hais tias thermal oxide wafers muaj ntau yam kev siv, lawv feem ntau yog siv hauv MEMS (micro-electromechanical systems) li thiab ua cov khoom siv dielectric.

Muaj ob txoj hauv kev tseem ceeb rau thermally oxidizing silicon wafers, thiab ob qho tib si hu rau kev tsim cov pa oxygen ntawm lub wafer nto.
Nyob rau hauv sib piv, cov oxide txheej yog tsim nyob rau sab saum toj ntawm lub wafer nyob rau hauv daim ntawv thov CVD.

Cov yeeb yaj kiab ntub dej thermal oxide feem ntau yog siv rau hauv cov xwm txheej uas hu rau cov txheej tuab ntawm silicon dioxide.

Piv nrog rau cov thermal oxide ntub dej, cov thermal oxide qhuav ua rau cov txheej txheem silicon dioxide ntau dua thiab yuav tsum tau ua haujlwm ntev dua. Cov txheej silicon dioxide qhuav tsuas yog 1, 000Å tuab vim yog cov kev txwv no.

Cim npe nrov: 76mm-300mm etched silicon wafer(3"-12"), Tuam Tshoj 76mm-300mm etched silicon wafer(3"-12") manufacturers, lwm tus neeg, Hoobkas