Yuav Ua Li Cas Ntxuav Wafers

Wafer tu yog hais txog cov txheej txheem ntawm kev tshem tawm cov kab mob thiab oxides ntawm qhov chaw ntawm lub wafer los ntawm kev siv tshuaj los yog lub cev thaum lub sij hawm tsim cov txheej txheem ntawm kev sib xyaw ua ke, kom lub ntsej muag wafer ua tau raws li qhov yuav tsum tau ua kom huv. Lub hauv paus ntsiab lus ntawm kev ntxuav wafer yog tshem tawm txhua yam impurities yam tsis muaj kev puas tsuaj rau wafer. [6]
Muaj plaub lub luag haujlwm tseem ceeb rau kev tshem tawm cov khoom: kev sib cais, oxidative decomposition, hluav taws xob repulsion ntawm cov khoom thiab cov silicon wafer nto, thiab me ntsis corrosion ntawm silicon wafer nto.
Rau kev tshem tawm cov khoom siv hlau, SC-2 tshuaj lossis HPM cov tshuaj feem ntau yog siv los txo cov ntsiab lus hlau ntawm qhov chaw wafer. Ntawm lawv, SC -2 daws yuav crystallize, uas yuav ua rau kom muaj pes tsawg leeg ntawm cov wafer nto tom qab ntxuav. Yog li, HF tuaj yeem siv los hloov HCL, lossis O3 ua ke nrog HF tuaj yeem siv los hloov SC -2 daws, uas tuaj yeem tshem tawm cov khoom hlau zoo.
Rau cov kuab paug organic, SPM tov los yog ultraviolet / ozone qhuav tu tshuab feem ntau yog siv los tshem tawm lawv.
Tom qab ntub dej ntxuav, wafer yuav tsum tau qhuav kom huv si kom ntseeg tau tias tsis muaj dej cim rau ntawm qhov chaw ua ntej nkag mus rau cov txheej txheem tom ntej. Peb hom kev ziab ntau tshaj plaws yog spin drying, Marangoni drying thiab kub isopropyl cawv spray drying.