Monocrystalline Silicon WafersYog cov ntaub nyias nyias ua los ntawm high-purity monocrystalline cov khoom siv silicon. Lawv yog cov khoom lag luam tseem ceeb hauv kev lag luam qib niaj hnub, ua cov haujlwm irreplacleable hauv teb xws li hnub ci photovoltacs, thiab cov hluav taws xob. Nrog kev nce qib nruam ntawm thev naus laus zis thiab kev nce qib ntxiv rau kev tsim kho monocrystalline silicon wafers tau mus tua neeg tseem ceeb. Txhua kauj ruam ntawm cov txheej txheem, los ntawm kev xaiv cov ntaub ntawv raw rau kev loj hlob ntawm monocrystalline siliconstalline siliconstal, thiab kev sib tsoo, cuam tshuam ntawm cov silicon wafers. Raws li cov chaw tsim khoom siv hluav taws xob-qib Monocrystalline Silicon Wafers, peb tau teeb tsa cov lus qhia ua tiav ntawm cov lus no rau cov ntsiab lus kev kawm thiab cov ntsiab lus tseem ceeb.
Kauj ruam 1: Cov Khoom Siv Raw Kev Siv
Thawj kauj ruam hauv kev tsim ib leeg siv lead ua silicon wafers yog cov txheej txheem lim tshuaj. Ua ntej, kev lag luam silicon muab rho tawm los ntawm silicon ore yog kho los ntawm kev kho lub cev thiab tshuaj kom hloov mus rau Trichlorosilane lossis Silicon Tetrachloride. Tom qab ntawd, cov qauv siemens lossis cov qauv siv tshuaj lom neeg siv tau los ntxuav cov sillicon mus rau qib hluav taws xob. Lub siab dawb huv - huv polysilicon yuav tsum ncav cuag ntau dua 99.9999999999%.
Kauj ruam 2: Ib Leeg - Crystal Kev Loj Hlob
Ib Leeg - Crystal Kev Loj Hlob Qauv tau muab faib ua czochralski, thiab cov sib nqus czochralski hom (McZ, uas tau tsim los ntawm CZ txoj kev).
Cov Czochralski txoj kev (CZ Txujckas (CZ Txujcves) cuam tshuam nrog cov khoom siv raw, rau hauv ib quartz crucible, cua sov thiab yaj lawv nyob rau hauv ib tug - crystal rauv. Tom qab ntawd, tus pas nrig - cov noob lead ua ke nrog txoj kab uas hla ntawm tsuas yog 10 hli (raug xa mus ua "noob") yog raus hauv cov kua molten. Tom qab, los ntawm kev cob qhia txheej txheem kev tswj, ib qho - Crystal Silicon Qws yog maj mam rub tawm.
Ntab thaj chaw (FZ) yog cov txheej txheem rau kev loj hlob ntawm ib qho - muaju los tswj qhov ntsuas kub thiab txias kom txav cov khoom los ntawm thaj chaw nqaim molten. Nws cov ntsiab cai yooj yim yog siv lub zog thermal los ua qhov chaw nyob ntawm ib qho ntawm cov polysilicon ingricon ingle, los ntawm kev kho lub ntsej muag ci ntsa iab nrog tib lub tshuab siv ua siv leitration.
MCZ (sib nqus czochralski)) qauv ntxiv daim teb sib nqus raws CZ (Czochralski). Ib qho - Crystal Silicon Inguced ua los ntawm MCZ cov qauv tau muaj cov ntsiab lus tsis zoo thiab cov ntsiab lus qis dua los ntawm CZ txoj kev.
Peb yam sib txawv ntawm peb txhua tus muaj lawv tus cwj pwm. Tam sim no, CZ txoj kev yog qhov feem ntau dav siv rau kev cog ib lub muaju ib qho muaju, thiab nws cov thev naus laus zis yog qhov paub tab tshaj plaws. Nws tuaj yeem tsim cov semiconductor - qib ua ib qho - Crystal Silicon Qws nrog txoj kab uas hla nrog 12 ntiv tes.
Lub MCZ Txujci ntxiv qhov sib nqus teb ntawm lub hauv paus ntawm CZ txoj kev. Rau kev tsim cov khoom siv hluav taws xob, ib qhov siab - ua tau zoo ib yam siv lead ua ke nrog cov ntsiab lus oxygen thiab zoo resistivity txoj kev sib xws yog yuav tsum tau nce cov txiaj ntsig tau.
Cov txheej txheem FZ FAFFICE siab purity thiab tuaj yeem siv los ua cov intrinsic silicon ingots. Qhov tsis kam ntawm Silicon Ingounts produced los ntawm hom no feem ntau siab. Tam sim no, qhov loj tshaj plaws uas tuaj yeem ua tiav yog 8 ntiv.
Kauj ruam 3: Ingicon Ingots Ua
Qhov saum npoo ntawm lub qhov dej - Grown Monocrystal silicon inogt yog tsis ncaj, thiab lub diamers txawv me ntsis.
Nyob rau lub sijhawm no, peb yuav tsum tau txiav tawm ntawm ob lub taub hau thiab tus Tsov tus tw, tawm hauv tsuas yog nruab nrab lub ntsiab xwb.
Tom qab ntawd, nruab nrab feem yuav tsum tau muab tso rau hauv ib lub grinder rau polish nto ntawm silicon ingot, ua kom tag nrho saum npoo ntawm cov kev ua kom du thiab txoj kab uas muaj txoj sia.
Tom qab sib tsoo, raws li tus neeg siv khoom yuav tsum tau ua, lub tiaj lossis cov lus tsis xav tau ua. Feem ntau, lub tiaj lossis thach tau ua raws li cov qauv semi.
Kauj Ruam 4: Slicing, Ntug Rounded thiab Lapping
Txhim kho cov av hauv av silicon Ingot hauv lub slicer. Feem ntau, pob zeb diamond xaim txiav yog siv. Txiav cov silicon ingot rau hauv silicon wafers ntawm cov tuab tuab raws li cov neeg yuav tsum muaj wafer thillness.
Cov npoo ntawm cov hlais pliced wafers ntse heev. Silicon nws tus kheej yog cov khoom siv loj heev thiab nquag ua si. Yog li ntawd, cov chips yog yuav tshwm sim ntawm cov npoo ntawm cov silicon wafers, uas tsis muaj txiaj ntsig zoo rau lawv siv thiab ua tiav. Ntxiv mus, saum npoo ntawm cov hlais wafers yuav muaj cov kab hlau thiab kev puas tsuaj saum npoo av, deb tsis tau raws li cov kev xav tau ntawm cov khoom cua silicon.
Nyob rau lub sijhawm no, ntug chamfering thiab sib tsoo yuav tsum tau nqa tawm ntawm kev txiav cov sillicon wafers kom tsis txhob muaj cov chips thiab tawg.
Los ntawm ntug rounded, ntug thiab saum npoo ntawm silicon wafer daim ntawv (lub kaum sab xis yog feem ntau 11 degree lossis 22 degree), ua rau ntug tsawg dua ntse thiab tsawg dua mus chipping. Lapping yog kev kho vaj huam sib luag ntawm silicon wafer sab, uas ua rau lub ntsej muag thiab hais lus cuav. Nws tseem yog ib kauj ruam tseem ceeb rau kev txuas ntxiv etching thiab polishing. Lapped Silicon Wafers tseem tuaj yeem siv rau hauv cov khoom siv hluav taws xob xws li TVS (Transient voltage suppressors), diodes, thiab triodes.
Kauj ruam 5: etched thiab poloshed
Tom ntej no, kev kho mob ntxiv ntawm silicon wafer deg yog nqa tawm.
Etching: los ntawm etching, me ntsis kev puas tsuaj rau ntawm silicon wafer saum npoo los ntawm cov txheej txheem yav dhau los tuaj yeem txo. Txawm li cas los xij, tom qab etching, lub waficon wafer tseem ua tsis tau raws li daim ICS (sib xyaw ua ke, uas tseem yuav ua rau muaj kev tsis txaus siab hauv qhov chaw tom ntej.
Nyob rau lub sijhawm no, cov silicon wafer saum npoo yuav tsum tau kho, namely tshuaj - kho tshuab polishing (CMP). Tom qab polishing, cov nplaim tuaj yeem siv rau cov txheej txheem txuas ntxiv xws li epitaxy (EPI) thiab nyias - Zaj duab xis tsis muaj kev sib tsoo. Polished silicon wafers yog ib qho tseem ceeb subtuf duab rau chip kev tsim, hluav taws xob tsim, thiab lwm yam.
Kauj Ruam 6: Huv Si, Tshuaj Ntsuam Xyuas Thiab Ntim
Lub polished silicon wafers yuav tsum tau ntxuav hauv lub tshuab ntxuav txhua yam thiab tom qab ntawd qhuav. Nyob rau lub sijhawm no, qhov saum npoo ntawm cov silicon wafers yog twb huv heev, nrog ntau leej thiab me me thiab me me rau nws. Cov hais yuav mus txog 0. 3um<10 per wafers, or 0.2um<20 per wafers, or 0.12um<30.
Tom qab ziab, ntau yam kev ntsuam xyuas tau nqa tawm ntawm cov khoom siv hluav taws xob silicon Cov yam ntxwv hluav taws xob thiab cov duab geometric, nrog rau cov pa oxygen thiab cov ntsiab lus carbon ntawm silicon wafers, tau raug sim hauv cov kauj ruam dhau los.
Tom qab ntawv sau cov txheej txheem ntim khoom. Feem ntau, cov wafers tsim nyog tau ntim rau hauv lub tshuab nqus plua plav, nrog 25 wafers hauv txhua daim Cassette. Txhawm rau zam kev rov ua kom muaj qhov kev paug tawm, ntim yuav tsum tau ua nyob rau hauv ib chav huv nrog qib kev nyiam huv ntawm chav kawm 100 lossis siab dua.
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Cov txheej txheem tsim khoom ntawmIb Leeg-Crystal Silicon Wafersyog ib txoj kev nyuaj thiab cov txheej txheem ncaj qha uas tsis yog yuav tsum muaj cov kev txhawb thev naus laus zis tab sis kuj tso siab rau txoj kev tswj nruj. Los ntawm cov khoom siv raw rau cov khoom kawg, qhov ua kom zoo ntawm txhua kauj ruam tuaj yeem tsim cov nqi ntau dua rau cov kev lag luam.
Yog tias koj tab tom nrhiav lub siab zoo ib leeg-siv lead ua silicon wafer xa lossis muaj ntxiv rau cov thev naus laus zis ntxiv, thov koj xav tauHu rau Ruyuan.Peb yuav muab cov kev daws teeb meem kev lag luam!