2", 3" thiab 4" GaSb Substrate

General SPECS

Loj

2"

3"

4"

Kev taw qhia

(100) ± 0.1 degree

(100) ± 0.1 degree

(100) ± 0.1 degree

Txoj kab uas hla (mm)

50.5±0.5

76.2±0.4

100.0±0.5

NTAWM Orientation

EJ

EJ

EJ

Ua siab ntev

± 0.1 degree

± 0.1 degree

± 0.1 degree

NTAWM Length (mm)

16±2

22±2

32.5±2.5

YOG Length (mm)

8±1

11±1

18±1

Thickness (hli)

500±25

625±25

1000±25

Qhov loj tuaj yeem kho tau.

Conductivity thiab Dopant

Dopant

Hom conductivity

CC / cm^-3

Mobility / cm² V^-1S^-1

Dislocation Ceev / cm^-2

Undoped

p-type

Tsawg dua lossis sib npaug li 2x10^-17

>500

2", 3", 4" Tsawg dua los yog sib npaug rau 1000

Tellurium (zeeg)

n-type

(0.5~9)x10¹⁷

3500~2000

2", 3", 4" Tsawg dua los yog sib npaug rau 1000

Kev ntsuas hluav taws xob nruj dua tuaj yeem muab tau raws li qhov kev thov.

HLUB

Nto

2"

3"

4"

Polished / Etched

TVV (μm)

<8

<8

<10

Hnyav (μm)

<8

<8

<10

Warp (μm)

<12

<12

<15

Polished / Polished

TVV (μm)

<5

<5

<5

Hnyav (μm)

<5

<5

<5

Warp (μm)

<8

<8

<10